X-ray photoelectron spectroscopy (XPS)
X-ray photoelectron spectroscopy (XPS) is a quantitative spectroscopic technique that measures the elemental composition, chemical state and electronic state of the elements that exist within a material. XPS spectra are obtained by irradiating a material with a beam of X-rays while simultaneously measuring the kinetic energy and number of electrons that escape from the top 1 to 10 nm of the material being analyzed. XPS requires ultra high vacuum (UHV) conditions.