CVD systems
© Tomasz Kosmala
© Tomasz Kosmala
This system is equipped with quartz, alumina and pyrex tubes. It is connected to four mass-flow controllers that allow to control the atmosphere inside the reactor, operating at pressures from ambient to 10-3 mbar, and supports up to 9 programmable temperatures with the maximum at 1200 °C.
This system allows classical chemical vapour deposition (CVD) synthesis, as well as different thermal treatments under controlled atmosphere. In addition, it has an integrated particles generator for aerosol synthesis.
This system allows classical chemical vapour deposition (CVD) synthesis, as well as different thermal treatments under controlled atmosphere. In addition, it has an integrated particles generator for aerosol synthesis.
Homemade cold-wall CVD reactor:
• Operating pressure from ambient to 10-8 mbar
• Resistive Joule heating system with maximum temperature 1250 °C
• Heating and cooling rate up to 33°C/sec
• Operating pressure from ambient to 10-8 mbar
• Resistive Joule heating system with maximum temperature 1250 °C
• Heating and cooling rate up to 33°C/sec
Both of the systems can dose simultaneously four different gases by high precision mass flow controllers: Aera FC-7700CD 200 and 500 sccm (standard cubic centimeter per minute) and MKS Instruments MF1 20 and 50 sccm.
